US Patent 11988971 Lithographic apparatus, substrate table, and method
All edits
Edits on 23 May, 2024
Golden AI
Edits made to:
Infobox (+36 properties)
Article (+373 characters)
US Patent 11988971 Lithographic apparatus, substrate table, and method
Article
Patent abstract
A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
Infobox
Is a
Patent Jurisdiction
Patent Number
Patent Inventor Names
Benjamin David Dawson0
Iliya Sigal0
Matthew Anthony Sorna0
Matthew Lipson0
Satish Achanta0
Tammo Uitterdijk0
Date of Patent
May 21, 2024
0Patent Application Number
176126790
Date Filed
May 5, 2020
0Patent Citations
Patent Primary Examiner
Find more entities like US Patent 11988971 Lithographic apparatus, substrate table, and method
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
