US Patent 9737934 Substrate holder and method of manufacturing a substrate holder
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Patent abstract
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
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Patent Inventor Names
Elisabeth Corinne Rodenburg0
Nicolaas Ten Kate0
Nina Vladimirovna Dziomkina0
Raymond Wilhelmus Louis Lafarre0
Sjoerd Nicolaas Lambertus Donders0
Yogesh Pramod Karade0
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US Patent 09737934 Substrate holder and method of manufacturing a substrate holder US Patent 9737934 Substrate holder and method of manufacturing a substrate holder
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Patent Number
09737934
Patent Number
9737934
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US Patent 09737934 Substrate holder and method of manufacturing a substrate holder
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Is a
Patent jurisdiction
Patent number
09737934
Date of patent
August 22, 2017
Patent application number
15296968
Date Filed
October 18, 2016
Patent primary examiner
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