Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Asaf Schlezinger0
Markus J. Stopper0
Date of Patent
September 5, 2017
0Patent Application Number
146094550
Date Filed
January 30, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments of the present invention generally relate to methods for inspecting wafers. After a brick is sliced into a plurality of bare wafers, a two-dimensional (2D) photoluminescence (PL) image of each wafer is taken, the PL images of the wafers in sequential order (i.e., the sequence of the wafers as they are sliced from the brick) are then combined to construct a three-dimensional (3D) model of the brick that highlights similar regions in the brick.
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