US Patent 9786597 Self-aligned pitch split for unidirectional metal wiring
Is a
Date Filed
March 11, 2013
0
Date of Patent
October 10, 2017
0
Patent Application Number
13793859
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Patent Inventor Names
Josephine B. Chang
0
Eric A. Joseph
0
Hiroyuki Miyazoe
0
Michael A. Guillorn
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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