Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sagarika Mukesh0
Nicholas Anthony Lanzillo0
Date of Patent
February 20, 2024
0Patent Application Number
175323100
Date Filed
November 22, 2021
0Patent Citations
0
...
Patent Primary Examiner
CPC Code
Patent abstract
A semiconductor device includes an upper section of a supervia formed via subtractive etching and a lower section of the supervia formed via damascene processing. The supervia connects non-adjacent interconnect wiring. The lower section and the upper section of the supervia each define a generally cone-shaped configuration. A distal end of the lower section of the supervia is non-obtuse. Moreover, the lower section of the supervia is formed in a V
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