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US Patent D1020668 Gas injector for substrate processing apparatus

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Yoshimasa Nagatomi0

Toru Kagaya0

Date of Patent

April 2, 2024

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Patent Application Number

298195260

Date Filed

December 15, 2021

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Patent Citations

US Patent D919083 In-vivo drug delivery

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US Patent D940270 Fire nozzle

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US Patent D532864 Nozzle

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US Patent D584919 Cooking pan cover

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US Patent D783351 Gas nozzle substrate processing apparatus

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US Patent D886947 Handheld shower

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US Patent D886948 Handheld shower

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US Patent D888196 Gas nozzle for substrate processing apparatus

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Patent Citations Received

US Patent D1042731 Gas nozzle for semiconductor manufacturing equipment

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Patent Primary Examiner

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CPC Code

0

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