US Patent D973116 Mainframe of substrate processing system
Patent D973116 was granted and assigned to Applied Materials on December, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 17, 2020
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Date of Patent
December 20, 2022
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Patent Applicant
Patent Application Number
29758664
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Patent Inventor Names
Michael C. Kuchar
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Travis Morey
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Ofer Amir
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Adam J. Wyatt
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Michael R. Rice
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
CPC Code
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