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US Patent D980814 Gas distributor for substrate processing apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
May 11, 2021
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Date of Patent
March 14, 2023
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Patent Application Number
29782978
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Patent Citations Received
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US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus
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US Patent 12016818 Vibrating therapy system and device
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US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device
0
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US Patent D1003450 Massage device
Patent Inventor Names
JaeHyun Kim
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JinHo Shin
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JeongHo Lee
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HyunSoo Jang
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D980814
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Patent Primary Examiner
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Christy Nemeth
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CPC Code
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G01C 19/5698
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G01C 19/5719
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H01H 33/664
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B24B 19/16
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G01N 27/40
0
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G01N 27/403
0
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B22F 10/28
0
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H01T 19/00
0
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C23C 16/50
0
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C23C 16/458
0
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