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US Patent D980814 Gas distributor for substrate processing apparatus

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Patent Citations Received
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US Patent 12016818 Vibrating therapy system and device
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US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device
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edited on 4 Dec, 2023
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US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus
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US Patent D1003450 Massage device
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Patent Inventor Names
HyunSoo Jang0
JaeHyun Kim0
JeongHo Lee0
JinHo Shin0
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US Patent D0980814 Gas distributor for substrate processing apparatus US Patent D980814 Gas distributor for substrate processing apparatus

Infobox
Patent Number
D09808140
Patent Number
D9808140
Edits on 15 Mar, 2023
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 US Patent D0980814 Gas distributor for substrate processing apparatus

Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D09808140
Date of Patent
March 14, 2023
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Patent Application Number
297829780
Date Filed
May 11, 2021
0
Patent Primary Examiner
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Christy Nemeth
0
CPC Code
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H01T 19/00
0
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G01V 3/02
0
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G01C 19/5719
0
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G01C 19/5698
0
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C23C 16/50
0
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C23C 16/458
0
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C23C 16/34
0
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H01J 37/20
0
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G01N 27/403
0
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G01N 27/40
0
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H01L 21/67
0
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H01L 21/687
0
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H01H 33/664
0
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H01L 21/02
0
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H01L 21/3065
0
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H01L 21/20
0
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B24B 19/16
0
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B22F 10/28
0

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