FEI Company

US Patent 11114271 Sixth-order and above corrected STEM multipole correctors

US Patent 11114272 Pulsed CFE electron source with fast blanker for ultrafast TEM applications

US Patent 11114275 Methods and systems for acquiring electron backscatter diffraction patterns

US Patent 11120542 Wettability estimation by differential multi-phase simulation

US Patent 11127560 Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope

US Patent 11127562 System and method for RF pulsed electron beam based STEM

US Patent 11100612 Acquisition strategy for neural network based image restoration

US Patent 11101101 Laser-based phase plate image contrast manipulation

US Patent 11101104 Multi modal cryo compatible GUID grid

US Patent 11150197 Methods and systems for inclusion analysis

US Patent 11151356 Using convolution neural networks for on-the-fly single particle reconstruction

US Patent 11152189 Method and system for plasma assisted low vacuum charged-particle microscopy

US Patent 11158487 Diagonal compound mill

US Patent 11171048 Adaptive endpoint detection for automated delayering of semiconductor samples

US Patent 7091497 Particle-optical device for irradiating an object

US Patent 7098667 Cold cathode ion gauge

US Patent 7103505 Defect analyzer

US Patent 11175242 Geometric alignment, sample motion correction, and intensity normalization of computed tomography projections using pi-line optimization

US Patent 11176656 Artificial intelligence-enabled preparation end-pointing

US Patent 7160475 Fabrication of three dimensional structures

US Patent 7161159 Dual beam system

US Patent 7241361 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

US Patent 7258901 Directed growth of nanotubes on a catalyst

US Patent 7285785 Apparatus with permanent magnetic lenses

US Patent 7301157 Cluster tool for microscopic processing of samples

US Patent 7308334 Graphical automated machine control and metrology

US Patent 7348556 Method of measuring three-dimensional surface roughness of a structure

US Patent 7362452 Method of adjusting the operating region of a tool component to a pre-determined element

US Patent 11183364 Dual beam microscope system for imaging during sample processing

US Patent 7375324 Stylus system for modifying small structures

US Patent 7378003 Thin-film magnetic recording head manufacture using selective imaging

US Patent 7378667 Particle-optical appliance provided with aberration-correcting means

US Patent 7388218 Subsurface imaging using an electron beam

US Patent 7408178 Method for the removal of a microscopic sample from a substrate

US Patent 7420184 Particle-optical apparatus with temperature switch

US Patent 7423263 Planar view sample preparation

US Patent 7442924 Repetitive circumferential milling for sample preparation

US Patent 7456413 Apparatus for evacuating a sample

US Patent 7463791 Method for automatic alignment of tilt series in an electron microscope

US Patent 7474419 Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus

US Patent 7474986 Defect analyzer

US Patent 7490009 Method and system for spectroscopic data analysis

US Patent 7504182 Photolithography mask repair

US Patent 7511282 Sample preparation

US Patent 7518121 Method for determining lens errors in a particle-optical device

US Patent 7541580 Detector for charged particle beam instrument

US Patent 7544523 Method of fabricating nanodevices

US Patent 7544938 Methods and apparatus for statistical characterization of nano-particles

US Patent 7544939 Method for determining the aberration coefficients of the aberration function of a particle-optical lens

US Patent 7569841 Deflection signal compensation for charged particle beam

US Patent 7601976 Dual beam system

US Patent 7611610 Method and apparatus for controlling topographical variation on a milled cross-section of a structure

US Patent 7615745 Method for separating a minute sample from a work piece

US Patent 7662524 Photolithography mask repair

US Patent 7664566 Graphical automated machine control and metrology

US Patent 7670455 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

US Patent 7670956 Beam-induced etching

US Patent 7671333 Apparatus for observing a sample with a particle beam and an optical microscope

US Patent 7674706 System for modifying small structures using localized charge transfer mechanism to remove or deposit material

US Patent 7675034 Charged particle instrument equipped with optical microscope

US Patent 7675049 Sputtering coating of protective layer for charged particle beam processing

US Patent 7718979 Particle-optical apparatus for simultaneous observing a sample with particles and photons

US Patent 7727681 Electron beam processing for mask repair

US Patent 7767979 Method for coupling and disconnecting a co-operative composite structure of a sample carrier and a sample holder

US Patent 7772564 Particle-optical apparatus equipped with a gas ion source

US Patent 7791020 Multistage gas cascade amplifier

US Patent 7825378 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus

US Patent 7845245 Method for attaching a sample to a manipulator by melting and then freezing part of said sample

US Patent 7858936 Slice and view with decoration

US Patent 7880151 Beam positioning for beam processing

US Patent 7888654 Cold field emitter

US Patent 7888655 Transfer mechanism for transferring a specimen

US Patent 7906762 Compact scanning electron microscope

US Patent 7915584 TEM with aberration corrector and phase plate

US Patent 7917349 Combined hardware and software instrument simulator for use as a teaching aid

US Patent 7977631 Method for obtaining images from slices of specimen

US Patent 7979217 Method and system for spectroscopic data analysis

US Patent 7987072 Defect analyzer

US Patent 7989778 Charged-particle optical system with dual loading options

US Patent 7999225 Charged particle source with integrated energy filter

US Patent 8011259 Sample carrier comprising a deformable strip of material folded back upon itself and sample holder