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US Patent 10026594 RF impedance matching network

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
October 12, 2016
Date of Patent
July 17, 2018
Patent Application Number
15291260
Patent Citations Received
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 12002611 High power low frequency coils
0
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US Patent 12027351 Plasma non-uniformity detection
0
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US Patent 11521832 Uniformity control for radio frequency plasma processing systems
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US Patent 11527385 Systems and methods for calibrating capacitors of matching networks
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US Patent 11545954 Impedance adjustment device
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US Patent 11552612 Impedance adjustment device and impedance adjustment method
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US Patent 10734196 Impedance matching device
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US Patent 10778209 Pin diode driving circuit and threshold value determination method
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US Patent 10812071 Drive circuit and impedance matching device
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•••
Patent Inventor Names
Imran Ahmed Bhutta
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10026594
Patent Primary Examiner
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Minh D A

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