US Patent 10177024 High temperature substrate pedestal module and components thereof
Patent 10177024 was granted and assigned to Lam Research on January, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 12, 2015
Date of Patent
January 8, 2019
Patent Applicant
Patent Application Number
14710151
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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