Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 25, 2022
Patent Application Number
16151074
Date Filed
October 3, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing apparatus, provided with a substrate carrier support to support a substrate carrier thereon. The carrier support comprises a top support surface to support the substrate carrier; a thermally insulating body of thermally insulating material; and, a primary heater to heat the carrier support. The thermally insulating body is provided at least between the support surface and the primary heater.
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