Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
John F. Stumpf0
Chris Wuester0
Date of Patent
June 18, 2019
Patent Application Number
15067028
Date Filed
March 10, 2016
Patent Citations
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A counterflow mixing device for a process chamber is disclosed, comprising an injection tube that introduces a fluid in a manner counter to a flow of a post-plasma gas mixture traveling downward from a plasma source. The invention allows for proper mixing of the fluid as well as avoiding recombination of generated ions and radicals.
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