Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 11232963 Substrate processing apparatus and method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
October 3, 2018
Date of Patent
January 25, 2022
Patent Application Number
16151074
Patent Citations
‌
US Patent 10269558 Method of forming a structure on a substrate
‌
US Patent 10297440 Method of manufacturing semiconductor device
‌
US Patent 10312055 Method of depositing film by PEALD using negative bias
‌
US Patent 10312129 Variable adjustment for precise matching of multiple chamber cavity housings
‌
US Patent 10319588 Method for depositing a metal chalcogenide on a substrate by cyclical deposition
‌
US Patent 10322384 Counter flow mixer for process chamber
‌
US Patent 10332963 Uniformity tuning of variable-height features formed in trenches
‌
US Patent 10032628 Source/drain performance through conformal solid state doping
‌
US Patent 10014212 Selective deposition of metallic films
‌
US Patent 10017856 Flowable gapfill using solvents
•••
Patent Citations Received
‌
US Patent 11929272 Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
0
‌
US Patent 11703229 Temperature adjustment apparatus for high temperature oven
0
‌
US Patent 11918715 Polarized LED filtration system
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11232963
Patent Primary Examiner
‌
Ibrahime A Abraham

Find more entities like US Patent 11232963 Substrate processing apparatus and method

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo