Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cheng-Bai Xu0
Irvinder Kaur0
Cong Liu0
Date of Patent
March 5, 2019
0Patent Application Number
151672230
Date Filed
May 27, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, acid generators are provided that comprise one or more hydrophilic moieties.
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