Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshitaka Komuro0
Masatoshi Arai0
Nobuhiro Michibayashi0
Takuya Ikeda0
Hiroto Yamazaki0
Mari Murata0
Date of Patent
February 22, 2022
0Patent Application Number
164211250
Date Filed
May 23, 2019
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition containing a resin component having a structural unit containing a group which is dissociated under the action of an acid and compound represented by the general formula (bd1). In the formula (bd1), Rx1 to Rx4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, Ry1 to Ry2 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, and Rz1 to Rz4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure. At least one of Rx1 to Rx4, Ry1 to Ry2 and Rz1 to Rz4 has an anion group, the entire anion moiety may be an n-valent anion, and Mm+ represents an m-valent organic cation
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