US Patent 10395919 Method and apparatus for filling a gap

Patent

US Patent 10032792 Semiconductor device and manufacturing method thereof

US Patent 10043661 Method for protecting layer by forming hydrocarbon-based extremely thin film

US Patent 10053774 Reactor system for sublimation of pre-clean byproducts and method thereof

US Patent 10083836 Formation of boron-doped titanium metal films with high work function

US Patent 10087522 Deposition of metal borides

US Patent 10087525 Variable gap hard stop design

US Patent 10090316 3D stacked multilayer semiconductor memory using doped select transistor channel

US Patent 10134757 Method of processing a substrate and a device manufactured by using the method

US Patent 10103040 Apparatus and method for manufacturing a semiconductor device

US Patent 10167557 Gas distribution system, reactor including the system, and methods of using the same

US Patent 11018047 Hybrid lift pin

US Patent 11286558 Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

US Patent 11289326 Method for reforming amorphous carbon polymer film

US Patent D947913 Susceptor shaft

US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

US Patent 10655221 Method for depositing oxide film by thermal ALD and PEALD

US Patent 10658205 Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber

US Patent 10665452 Source/drain performance through conformal solid state doping

US Patent 10672636 Cassette holder assembly for a substrate cassette and holding member for use in such assembly

United States Patent and Trademark Office

Charles D. Garber