US Patent 10580695 Feature fill with nucleation inhibition
Patent 10580695 was granted and assigned to Lam Research on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 29, 2018
Date of Patent
March 3, 2020
Patent Applicant
Patent Application Number
15991413
Patent Citations
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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