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US Patent 10629429 Selective deposition of silicon oxide

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Edits on 26 May, 2023
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edited on 26 May, 2023
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Infobox (-1 properties)
Infobox
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106294290
Edits on 28 Apr, 2023
"update citations for inverse infoboxes"
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Edits on 26 Sep, 2022
"update citations for inverse infoboxes"
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edited on 26 Sep, 2022
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edited on 26 Sep, 2022
"Entity importer update"
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edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
106294290
Date of Patent
April 21, 2020
0
Patent Application Number
162069150
Date Filed
November 30, 2018
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=106294290
Patent Citations
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US Patent 10043656 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
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US Patent 10176984 Selective deposition of silicon oxide
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US Patent 10199212 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
0
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US Patent 10242866 Selective deposition of silicon nitride on silicon oxide using catalytic control
0
Patent Citations Received
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US Patent 10825679 Selective growth of SIO2 on dielectric surfaces in the presence of copper
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US Patent 10903071 Selective deposition of silicon oxide
0
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US Patent 10998187 Selective deposition with atomic layer etch reset
0
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US Patent 11404275 Selective deposition using hydrolysis
0
Patent Primary Examiner
‌
Selim U Ahmed
0
"update citations for inverse infoboxes"
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edited on 26 Sep, 2022
"update citations for inverse infoboxes"
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edited on 26 Sep, 2022
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"update inverses"
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edited on 3 Aug, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11404275 Selective deposition using hydrolysis
Edits on 8 Jun, 2022
"Entity importer update"
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Golden AI
edited on 8 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10629429
Edits on 11 Feb, 2022
"update inverses"
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Golden AI
edited on 11 Feb, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 10998187 Selective deposition with atomic layer etch reset
Edits on 9 Feb, 2022
"update inverses"
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Golden AI
edited on 9 Feb, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 10903071 Selective deposition of silicon oxide
Edits on 7 Feb, 2022
"update inverses"
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Golden AI
edited on 7 Feb, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 10825679 Selective growth of SIO2 on dielectric surfaces in the presence of copper
Edits on 2 Feb, 2022
"Created via: Entity Importer"
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created this topic on 2 Feb, 2022
Edits made to:
Infobox (+13 properties)
‌

 US Patent 10629429 Selective deposition of silicon oxide

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10629429
Date of patent
April 21, 2020
Patent application number
16206915
Date Filed
November 30, 2018
Patent citations
‌
US Patent 10043656 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
‌
US Patent 10176984 Selective deposition of silicon oxide
‌
US Patent 10199212 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
‌
US Patent 10242866 Selective deposition of silicon nitride on silicon oxide using catalytic control
Patent primary examiner
‌
Selim U Ahmed

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