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US Patent 10629429 Selective deposition of silicon oxide

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
0
Date Filed
November 30, 2018
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Date of Patent
April 21, 2020
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Patent Applicant
Lam Research
Lam Research
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Patent Application Number
16206915
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Patent Citations
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US Patent 10199212 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
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US Patent 10043656 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
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US Patent 10176984 Selective deposition of silicon oxide
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US Patent 10242866 Selective deposition of silicon nitride on silicon oxide using catalytic control
Patent Citations Received
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US Patent 11404275 Selective deposition using hydrolysis
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US Patent 10825679 Selective growth of SIO2 on dielectric surfaces in the presence of copper
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US Patent 10903071 Selective deposition of silicon oxide
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US Patent 10998187 Selective deposition with atomic layer etch reset
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10629429
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Patent Primary Examiner
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Selim U Ahmed
0

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