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US Patent 10811284 Substrate processing method and apparatus

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Edits on 18 May, 2023

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Golden AI

edited on 18 May, 2023

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=10811284

Edits on 27 Apr, 2023

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Golden AI

edited on 27 Apr, 2023

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Patent Citations

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US Patent 10166647 Polishing apparatus and polishing method

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Golden AI

edited on 25 Apr, 2023

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US Patent 10249518 Polishing device and polishing method

Edits on 23 Apr, 2023

"update citations for inverse infoboxes"

Golden AI

edited on 23 Apr, 2023

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US Patent 10414013 Polishing method and polishing apparatus

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Golden AI

edited on 23 Apr, 2023

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US Patent 10357867 Polishing system

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Golden AI

edited on 23 Apr, 2023

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US Patent 10134614 Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus

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Golden AI

edited on 6 Apr, 2023

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Patent Citations

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US Patent 10074472 InFO coil on metal plate with slot

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Golden AI

edited on 3 Apr, 2023

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US Patent 10328465 Substrate processing apparatus and substrate processing method

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Golden AI

edited on 3 Apr, 2023

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US Patent 10105792 SiC substrate separating method

Edits on 1 Apr, 2023

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Golden AI

edited on 1 Apr, 2023

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US Patent 10307884 Apparatus for controlling a movement of a grinding wheel, semiconductor wafer grinding system and method for forming semiconductor devices

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Golden AI

edited on 1 Apr, 2023

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Patent Citations

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US Patent 10427269 Polishing apparatus and polishing method

Edits on 30 Mar, 2023

"update citations for inverse infoboxes"

Golden AI

edited on 30 Mar, 2023

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US Patent 10155294 Polishing apparatus and polishing method

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Golden AI

edited on 30 Mar, 2023

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US Patent 10032642 Substrate liquid processing apparatus

Edits on 24 Mar, 2023

"update citations for inverse infoboxes"

Golden AI

edited on 24 Mar, 2023

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Patent Citations

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US Patent 10343252 Polishing apparatus for detecting abnormality in polishing of a substrate

Edits on 28 Sep, 2022

"update citations for inverse infoboxes"

Golden AI

edited on 28 Sep, 2022

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Patent Citations

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US Patent 10249518 Polishing device and polishing method

Edits on 26 Sep, 2022

"update citations for inverse infoboxes"

Golden AI

edited on 26 Sep, 2022

Infobox

Patent Citations

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US Patent 10427269 Polishing apparatus and polishing method

"update citations for inverse infoboxes"

Golden AI

edited on 26 Sep, 2022

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Patent Citations

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US Patent 10391608 Backside polisher with dry frontside design and method using the same

Edits on 25 Sep, 2022

"update citations for inverse infoboxes"

Golden AI

edited on 25 Sep, 2022

Infobox

Patent Citations

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US Patent 10074472 InFO coil on metal plate with slot

"update citations for inverse infoboxes"

Golden AI

edited on 25 Sep, 2022

Infobox

Patent Citations

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US Patent 10032642 Substrate liquid processing apparatus

"update citations for inverse infoboxes"

Golden AI

edited on 25 Sep, 2022

Infobox

Patent Citations

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US Patent 10414013 Polishing method and polishing apparatus

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