Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Siva P. Adusumilli0
Anthony K. Stamper0
John J. Ellis-Monaghan0
Steven M. Shank0
Date of Patent
January 26, 2021
0Patent Application Number
165756750
Date Filed
September 19, 2019
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to radio frequency (RF) switches with airgap structures and methods of manufacture. The structure includes a substrate with at least one airgap structure formed in a well region under at least one gate structure, and which extends to a junction formed by a source/drain region of the at least one gate structure.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
