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US Patent 10903316 Radio frequency switches with air gap structures
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Patent
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Date Filed
September 19, 2019
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Date of Patent
January 26, 2021
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Patent Application Number
16575675
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Patent Citations
US Patent 10109490 Cobalt interconnects formed by selective bottom-up fill
US Patent 10461152 Radio frequency switches with air gap structures
US Patent 10062757 Semiconductor device with buried metallic region, and method for manufacturing the semiconductor device
US Patent 10446643 Sealed cavity structures with a planar surface
Patent Citations Received
US Patent 11923363 Semiconductor structure having bottom isolation and enhanced carrier mobility
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US Patent 11410872 Oxidized cavity structures within and under semiconductor devices
Patent Inventor Names
Siva P. Adusumilli
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Anthony K. Stamper
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John J. Ellis-Monaghan
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Steven M. Shank
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10903316
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Patent Primary Examiner
Jarrett J Stark
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