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US Patent 11404244 High-resolution x-ray spectroscopy surface material analysis
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Patent
Date Filed
February 10, 2021
Date of Patent
August 2, 2022
Patent Application Number
17173016
Patent Citations
US Patent 10522323 Electron energy loss spectroscopy with adjustable energy resolution
US Patent 10535495 Sample manipulation for nondestructive sample imaging
US Patent 10825648 Studying dynamic specimens in a transmission charged particle microscope
US Patent 10830715 Cross sectional depth composition generation utilizing scanning electron microscopy
US Patent 10922809 Method for detecting voids and an inspection system
US Patent 10890545 Apparatus for combined stem and EDS tomography
US Patent 11022565 Process monitoring
US Patent 10043264 Integration of automatic and manual defect classification
US Patent 10468230 Nondestructive sample imaging
Patent Citations Received
US Patent 11626267 Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias voltage
US Patent 11501951 X-ray imaging in cross-section using un-cut lamella with background material
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11404244
Patent Primary Examiner
David A. Vanore
CPC Code
H01J 2237/2442
H01J 37/28
G01N 23/2252
H01J 2237/2807
H01J 37/222
H01J 37/244
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