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US Patent 11567119 Testing system including active thermal interposer device
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Patent
Date Filed
November 19, 2021
Date of Patent
January 31, 2023
Patent Application Number
17531649
Patent Citations
US Patent 10955466 Environment control apparatus
US Patent 10983145 System for testing devices inside of carriers
US Patent 10056225 Adjusting substrate temperature to improve CD uniformity
US Patent 10126356 Systems and methods for conforming test tooling to integrated circuit device with whirlwind cold plate
US Patent 10163668 Thermal dynamic response sensing systems for heaters
US Patent 10354785 Passive thermal switch devices having thermal switch material that passively switches between a thermal insulating state and a thermal conducting state and vehicles having the same
US Patent 10656200 High volume system level testing of devices with pop structures
US Patent 10775408 System for testing devices inside of carriers
US Patent 10908207 Systems and methods for conforming device testers to integrated circuit device with pressure relief valve
Patent Citations Received
US Patent 11754620 DUT placement and handling for active thermal interposer device
US Patent 12061227 Integrated heater and temperature measurement
0
US Patent 11656272 Test system with a thermal head comprising a plurality of adapters and one or more cold plates for independent control of zones
0
US Patent 11693051 Thermal head for independent control of zones
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11567119
Patent Primary Examiner
Vinh P Nguyen
CPC Code
G01R 31/2865
G01R 1/0433
G01R 31/2896
G01R 31/311
G01R 31/2879
G01R 31/2849
G01R 31/002
G01R 31/307
G01R 31/2853
G01R 31/2881
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