US Patent 11646198 Ultrathin atomic layer deposition film accuracy thickness control
Patent 11646198 was granted and assigned to Lam Research on May, 2023 by the United States Patent and Trademark Office.
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Edits on 14 Aug, 2023
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Infobox (+5 properties)
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Patent Inventor Names
Adrien LaVoie0
Hu Kang0
Jun Qian0
Purushottam Kumar0
Seiji Matsuyama0
Edits on 10 May, 2023
Golden AI
Edits made to:
Infobox (+28 properties)
Article (+88 characters)
US Patent 11646198 Ultrathin atomic layer deposition film accuracy thickness control
Article
Methods for depositing films by atomic layer deposition using aminosilanes are provided.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
116461980
Date of Patent
May 9, 2023
0Patent Application Number
173059380
Date Filed
July 16, 2021
0Patent Citations
0
Patent Primary Examiner
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