US Patent 11781238 Systems and methods for plate-up detection
Patent 11781238 was granted and assigned to Applied Materials on October, 2023 by the United States Patent and Trademark Office.
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US Patent 11781238 Systems and methods for plate-up detection
Article
Patent abstract
Systems for electroplating seal inspection may include a module configured to support a seal for inspection. The module may include a set of supports positioned to contact an interior rim of the seal. The module may be configured to rotate the seal about a central axis. The system may also include a detector positioned on the module. The detector may be positioned to scan an exterior surface of the seal.
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David W. Bricker
Matthew Heller
Date of Patent
October 10, 2023
Patent Application Number
16859256
Date Filed
April 27, 2020
Patent Citations
Patent Primary Examiner
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