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US Patent 11841561 Silicon photonic device with backup light paths
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Patent
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Date Filed
July 19, 2021
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Date of Patent
December 12, 2023
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Patent Application Number
17379620
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Patent Citations
US Patent 9085455 MEMS devices and methods for forming same
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US Patent 9138994 MEMS devices and methods of fabrication thereof
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US Patent 9139420 MEMS device structure and methods of forming same
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US Patent 9139423 Micro electro mechanical system structures
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US Patent 9181083 MEMS devices and methods of forming the same
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US Patent 9187317 MEMS integrated pressure sensor and microphone devices and methods of forming same
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US Patent 9233839 MEMS device and method of forming the same
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US Patent 9236877 Micro-electro-mechanical systems (MEMS), systems, and operating methods thereof
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US Patent 9238581 Triple-axis MEMS accelerometer
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US Patent 9389365 Single laser multi-frequency transmitter
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•••
Patent Inventor Names
Weiwei Song
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Chan-Hong Chern
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Stefan Rusu
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Chih-Chang Lin
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11841561
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Patent Primary Examiner
Robert Tavlykaev
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CPC Code
G02F 2201/58
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G02F 2201/508
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G02F 2201/506
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G02F 1/025
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G02F 1/225
0
G02F 1/2255
0
G02F 2203/20
0
G02F 1/2257
0
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