US Patent 11876114 Airgap gate spacer

Patent

US Patent 10446653 Transistor-based semiconductor device with air-gap spacers and gate contact over active area

US Patent 10679906 Method of forming nanosheet transistor structures with reduced parasitic capacitance and improved junction sharpness

US Patent 10840351 Transistor with airgap spacer and tight gate pitch

US Patent 10886378 Method of forming air-gap spacers and gate contact over active region and the resulting device

US Patent 11011638 Transistor having airgap spacer around gate structure

US Patent 11031485 Transistor with airgap spacer

US Patent 9368572 Vertical transistor with air-gap spacer

US Patent 9305835 Formation of air-gap spacer in transistor

US Patent 7741663 Air gap spacer formation

US Patent 10008577 Methods of forming an air-gap spacer on a semiconductor device and the resulting device

United States Patent and Trademark Office

Sonya McCall-Shepard

H01L 21/823828

H01L 21/823814

H01L 29/41783

H01L 29/6656

H01L 29/6653

H01L 29/0653

H01L 29/4991

H01L 21/76802

H01L 21/764

H01L 21/7682