US Patent 11975965 MEMS resonator
Patent 11975965 was granted and assigned to SiTime on May, 2024 by the United States Patent and Trademark Office.
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US Patent 11975965 MEMS resonator
Article
Patent abstract
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Infobox
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles I. Grosjean0
Ginel C. Hill0
Joseph C. Doll0
Nicholas Miller0
Paul M. Hagelin0
Date of Patent
May 7, 2024
0Patent Application Number
183408150
Date Filed
June 23, 2023
0Patent Citations
0
Patent Primary Examiner
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