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US Patent 11975965 MEMS resonator

Patent 11975965 was granted and assigned to SiTime on May, 2024 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Current Assignee

SiTime

Date Filed

June 23, 2023

Date of Patent

May 7, 2024

Patent Applicant

SiTime

Patent Application Number

18340815

Patent Citations

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US Patent 7446619 Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same

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US Patent 7202761 Temperature compensation for silicon MEMS resonator

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US Patent 7369003 Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same

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US Patent 7369004 Microelectromechanical oscillator and method of operating same

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US Patent 7439658 Piezoelectric vibrator, oscillator, electronic part, electronic apparatus, method of fabricating piezoelectric vibrator and method of fabricating electronic part

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US Patent 7443258 Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same

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US Patent 9071226 Micromechanical resonator and method for manufacturing thereof

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US Patent 9214623 Doped piezoelectric resonator

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US Patent 9705470 Temperature-engineered MEMS resonator

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US Patent 9712128 Microelectromechanical resonator

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Patent Inventor Names

Ginel C. Hill

Charles I. Grosjean

Nicholas Miller

Paul M. Hagelin

Joseph C. Doll

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

11975965

Patent Primary Examiner

CPC Code

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