US Patent 12085844 Ultra-thin, ultra-low density films for EUV lithography
Is a
Date Filed
August 7, 2023
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Date of Patent
September 10, 2024
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Patent Application Number
18231000
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Patent Inventor Names
Marcio D. Lima
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Takahiro Ueda
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
CPC Code
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