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US Patent 6961116 Lithographic apparatus, device manufacturing method, and device manufactured thereby

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Edits on 6 Nov, 2024
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edited on 6 Nov, 2024
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US Patent 12135505 Spectrometric metrology systems based on multimode interference and lithographic apparatus
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Edits on 30 Oct, 2024
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edited on 30 Oct, 2024
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US Patent 12130538 Broadband radiation generation in hollow-core fibers
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edited on 30 Oct, 2024
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US Patent 12130468 Method of manufacture of a capillary for a hollow-core photonic crystal fiber
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Edits on 24 Oct, 2024
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edited on 24 Oct, 2024
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US Patent 12124173 Lithographic apparatus, metrology systems, illumination sources and methods thereof
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Edits on 19 Sep, 2024
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edited on 19 Sep, 2024
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edited on 4 Jul, 2024
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US Patent 12025925 Metrology method and lithographic apparatuses
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Edits on 6 Jun, 2024
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edited on 6 Jun, 2024
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US Patent 11999645 Optical fibers and production methods therefor
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Edits on 29 May, 2024
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edited on 29 May, 2024
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edited on 8 May, 2024
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US Patent 11977334 Wavefront optimization for tuning scanner based on performance matching
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Edits on 1 May, 2024
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edited on 1 May, 2024
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US Patent 11971665 Wafer alignment using form birefringence of targets or product
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edited on 1 May, 2024
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edited on 29 Mar, 2024
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US Patent 11940608 Dark field microscope
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Edits on 14 Mar, 2024
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edited on 14 Mar, 2024
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US Patent 11927891 Apparatus and methods for determining the position of a target structure on a substrate
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edited on 14 Mar, 2024
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US Patent 11927892 Alignment method and associated alignment and lithographic apparatuses
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Edits on 22 Feb, 2024
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Golden AI
edited on 22 Feb, 2024
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US Patent 11906906 Metrology method and associated metrology and lithographic apparatuses
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Edits on 1 Feb, 2024
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edited on 1 Feb, 2024
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US Patent 11886096 Assembly including a non-linear element and a method of use thereof
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Edits on 19 Jan, 2024
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edited on 19 Jan, 2024
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US Patent 11875101 Method for patterning process modelling
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Edits on 13 Dec, 2023
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edited on 13 Dec, 2023
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US Patent 11841628 Apparatus for and method of sensing alignment marks
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