Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshikazu Furui0
Date of Patent
September 7, 2010
Patent Application Number
11848423
Date Filed
August 31, 2007
Patent Citations Received
0
0
...
Patent Primary Examiner
Patent abstract
Prior to dicing, a volatile protective agent is applied to at least the face of the substrate in which the devices are fabricated. Then the devices are separated by dicing. After dicing, the surface of the volatile protective agent is cleaned, and then the volatile protective agent is evaporated.
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