US Patent 7816022 Composite structure for microlithography and optical arrangement
Patent 7816022 was granted and assigned to Carl Zeiss SMT on October, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 9, 2009
Date of Patent
October 19, 2010
Patent Application Number
12368027
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7816022 Composite structure for microlithography and optical arrangement
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
