US Patent 8881083 Methods for improving double patterning route efficiency
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Patent Inventor Names
Hidekazu Yoshida0
Jongwook Kye0
Juhan Kim0
Lei Yuan0
Mahbub Rashed0
Yunfei Deng0
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US Patent 08881083 Methods for improving double patterning route efficiency US Patent 8881083 Methods for improving double patterning route efficiency
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Patent Number
088810830
Patent Number
88810830
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Patent Jurisdiction
Patent Number
088810830
Date of Patent
November 4, 2014
0Patent Application Number
138748030
Date Filed
May 1, 2013
0Official Website
Patent Primary Examiner
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US Patent 08881083 Methods for improving double patterning route efficiency
Infobox
Is a
Patent jurisdiction
Patent number
08881083
Date of patent
November 4, 2014
Patent application number
13874803
Date Filed
May 1, 2013
Patent primary examiner
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