US Patent 8881083 Methods for improving double patterning route efficiency
Is a
Date Filed
May 1, 2013
0
Date of Patent
November 4, 2014
0
Patent Application Number
13874803
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Patent Inventor Names
Hidekazu Yoshida
0
Lei Yuan
0
Mahbub Rashed
0
Yunfei Deng
0
Jongwook Kye
0
Juhan Kim
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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