US Patent 8901016 Method of forming metal oxide hardmask

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

89010160

Patent Inventor Names

Jeongseok Ha0

Shintaro Kaido0

Hideaki Fukuda0

Date of Patent

December 2, 2014

Patent Application Number

133334200

Date Filed

December 21, 2011

Patent Citations Received

‌

US Patent 12112980 Method to create air gaps

‌

US Patent 11987876 Chamfer-less via integration scheme

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US Patent 12094711 Tin oxide films in semiconductor device manufacturing

Patent Primary Examiner

‌

Savitr Mulpuri

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