US Patent 8901016 Method of forming metal oxide hardmask
Is a
Date Filed
December 21, 2011
0
Date of Patent
December 2, 2014
0
Patent Application Number
13333420
0
Patent Inventor Names
Jeongseok Ha
0
Shintaro Kaido
0
Hideaki Fukuda
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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