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US Patent 8927907 Thermally zoned substrate holder assembly

Patent 8927907 was granted and assigned to Tokyo Electron on January, 2015 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12061227 Integrated heater and temperature measurement
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US Patent 11940487 Thermal solution for massively parallel testing
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US Patent 11852678 Multi-input multi-zone thermal control for device testing
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Patent abstract

A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).

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US Patent 11774492 Test system including active thermal interposer device
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US Patent 11754620 DUT placement and handling for active thermal interposer device
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US Patent 11693051 Thermal head for independent control of zones
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US Patent 11674999 Wafer scale active thermal interposer for device testing
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US Patent 11656273 High current device testing apparatus and systems
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0892790700
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US Patent 08927907 Thermally zoned substrate holder assembly US Patent 8927907 Thermally zoned substrate holder assembly

Infobox
Patent Number
0892790700
Patent Number
892790700
Edits on 21 Apr, 2023
"Entity importer update"
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edited on 21 Apr, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Tokyo Electron
Tokyo Electron
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
089279070
Date of Patent
January 6, 2015
0
Patent Application Number
133071760
Date Filed
November 30, 2011
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=089279070
Patent Primary Examiner
‌
Sylvia R. MacArthur
0
Edits on 24 Sep, 2022
"Entity importer update"
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Golden AI
edited on 24 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Tokyo Electron
Tokyo Electron
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
089279070
Date of Patent
January 6, 2015
0
Patent Application Number
133071760
Date Filed
November 30, 2011
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=089279070
Patent Primary Examiner
‌
Sylvia R. MacArthur
0
Edits on 15 Jun, 2022
"Entity importer update"
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Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=08927907
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created this topic on 28 Dec, 2021
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Infobox (+8 properties)
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 US Patent 08927907 Thermally zoned substrate holder assembly

Infobox
Is a
Patent
Patent
Current assignee
Tokyo Electron
Tokyo Electron
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
08927907
Date of patent
January 6, 2015
Patent application number
13307176
Date Filed
November 30, 2011
Patent primary examiner
‌
Sylvia R. MacArthur

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