Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 21, 2016
Patent Application Number
14026761
Date Filed
September 13, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films. These thin films are used as high resolution, low line edge roughness (LER) EUV photoresists. The complexes may also be included in nanoparticle form for use in photoresists.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
