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US Patent 9372402 Molecular organometallic resists for EUV

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US Patent 12072626 Organometallic radiation patternable coatings with low defectivity and corresponding methods
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US Patent 11988961 Radiation based patterning methods
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US Patent 11972948 Adhesion layers for EUV lithography
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US Patent 11947262 Process environment for inorganic resist patterning
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Patent abstract

Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films. These thin films are used as high resolution, low line edge roughness (LER) EUV photoresists. The complexes may also be included in nanoparticle form for use in photoresists.

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US Patent 11789362 Semiconductor resist composition, and method of forming patterns using the composition
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US Patent 11789361 Semiconductor resist composition, and method of forming patterns using the composition
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US Patent 09372402 Molecular organometallic resists for EUV US Patent 9372402 Molecular organometallic resists for EUV

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Patent Number
0937240200
Patent Number
937240200
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0937240200
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
093724020
Date of Patent
June 21, 2016
0
Patent Application Number
140267610
Date Filed
September 13, 2013
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=093724020
Patent Primary Examiner
‌
Leszek Kiliman
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Edits on 25 Sep, 2022
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edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
093724020
Date of Patent
June 21, 2016
0
Patent Application Number
140267610
Date Filed
September 13, 2013
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=093724020
Patent Primary Examiner
‌
Leszek Kiliman
0
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09372402
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 US Patent 09372402 Molecular organometallic resists for EUV

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09372402
Date of patent
June 21, 2016
Patent application number
14026761
Date Filed
September 13, 2013
Patent primary examiner
‌
Leszek Kiliman

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