Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 20, 2016
Patent Application Number
14288236
Date Filed
May 27, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
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