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US Patent 9525398 Single crystal micromechanical resonator and fabrication methods thereof

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Patent Citations Received
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US Patent 12006206 Techniques for bidirectional transduction of quantum level signals between optical and microwave frequencies using a common acoustic intermediary
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US Patent 11996820 Fifth-generation (5G)-focused piezoelectric resonators and filters
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Patent abstract

The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.

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US Patent 11791794 Transversely-excited film bulk acoustic resonator with reduced spurious modes
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US Patent 11750168 Transversely-excited film bulk acoustic resonator with tether-supported diaphragm
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US Patent 11689179 Lamb wave resonators in single-crystal substrate
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0952539800
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US Patent 09525398 Single crystal micromechanical resonator and fabrication methods thereof US Patent 9525398 Single crystal micromechanical resonator and fabrication methods thereof

Infobox
Patent Number
0952539800
Patent Number
952539800
Edits on 28 Mar, 2023
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
095253980
Date of Patent
December 20, 2016
0
Patent Application Number
142882360
Date Filed
May 27, 2014
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=095253980
Patent Primary Examiner
‌
Scott B. Geyer
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edited on 28 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
095253980
Date of Patent
December 20, 2016
0
Patent Application Number
142882360
Date Filed
May 27, 2014
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=095253980
Patent Primary Examiner
‌
Scott B. Geyer
0
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09525398
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 US Patent 09525398 Single crystal micromechanical resonator and fabrication methods thereof

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09525398
Date of patent
December 20, 2016
Patent application number
14288236
Date Filed
May 27, 2014
Patent primary examiner
‌
Scott B. Geyer

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