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US Patent 9608065 Air gap spacer for metal gates
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Patent
Date Filed
June 3, 2016
Date of Patent
March 28, 2017
Patent Application Number
15173132
Patent Citations Received
US Patent 11869937 Semiconductor device and method of forming the semiconductor device
0
US Patent 11929419 Semiconductor device
0
US Patent 11935932 Semiconductor device and method
0
US Patent 11664333 Method of manufacturing die seal ring
0
US Patent 11688766 Seal material for air gaps in semiconductor devices
0
US Patent 11715761 Semiconductor device with air gap on gate structure and method for forming the same
0
US Patent 11769690 Semiconductor device and method of fabricating the same
US Patent 11854907 Contact air gap formation and structures thereof
0
US Patent 11869936 Semiconductor device and method of forming the semiconductor device
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9608065
Patent Primary Examiner
Tan N. Tran
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