Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 19, 2017
Patent Application Number
15269247
Date Filed
September 19, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a semiconductor substrate, and a dielectric layer on an upper surface of the semiconductor substrate. A contact stack is formed in the dielectric layer. The contact stack includes an electrically conductive contact element, and a contact liner on first and second opposing sidewalls of the contact element. A first air gap is interposed between the dielectric layer and the contact liner on the first side wall, and a second air gap interposed between the dielectric layer and the contact liner on the second side wall.
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