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US Patent 9768118 Contact having self-aligned air gap spacers
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Patent
Date Filed
September 19, 2016
Date of Patent
September 19, 2017
Patent Application Number
15269247
Patent Citations Received
US Patent 11664333 Method of manufacturing die seal ring
0
US Patent 11804402 FinFET structure with controlled air gaps
US Patent 11715761 Semiconductor device with air gap on gate structure and method for forming the same
0
US Patent 11688632 Semiconductor device with linerless contacts
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9768118
Patent Primary Examiner
Evan Pert
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