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Tegal Corporation

Tegal Corporation is a Petaluma, California-based company founded in 1972.

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Edits on 10 Jun, 2022
"Entity importer update"
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Golden AI
edited on 10 Jun, 2022
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Organization
Edits on 8 Apr, 2022
"Patent autocalculation"
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edited on 8 Apr, 2022
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Patents assigned (count)
18
Edits on 14 Dec, 2021
"Remove inverse infobox"
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edited on 14 Dec, 2021
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Infobox (-18 properties)
Infobox
Patents
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US Patent 7087522 Multilayer copper structure for improving adhesion property
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US Patent 7115169 Replaceable shielding apparatus
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US Patent 7153542 Assembly line processing method
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US Patent 7163721 Method to plasma deposit on organic polymer dielectric film
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US Patent 7169623 System and method for processing a wafer including stop-on-aluminum processing
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US Patent 7179350 Reactive sputtering of silicon nitride films by RF supported DC magnetron
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US Patent 7208396 Permanent adherence of the back end of a wafer to an electrical component or sub-assembly
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US Patent 7223699 Plasma etch reactor and method
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US Patent 7235484 Nanolayer thick film processing system and method
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US Patent 7270729 System for, and method of, etching a surface on a wafer
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US Patent 7361387 Plasma enhanced pulsed layer deposition
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US Patent 7425224 High pressure chemical vapor trapping method
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US Patent 7439188 Reactor with heated and textured electrodes and surfaces
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US Patent 7442615 Semiconductor processing system and method
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US Patent 7467598 System for, and method of, etching a surface on a wafer
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US Patent 7645618 Dry etch stop process for eliminating electrical shorting in MRAM device structures
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US Patent 7678705 Plasma semiconductor processing system and method
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US Patent 7867905 System and method for semiconductor processing
Edits on 6 Dec, 2021
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edited on 6 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
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US Patent 7867905 System and method for semiconductor processing
Edits on 4 Dec, 2021
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edited on 4 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
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US Patent 7678705 Plasma semiconductor processing system and method
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edited on 3 Dec, 2021
Edits on 1 Dec, 2021
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
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US Patent 7467598 System for, and method of, etching a surface on a wafer
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7442615 Semiconductor processing system and method
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7439188 Reactor with heated and textured electrodes and surfaces
Edits on 1 Dec, 2021
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Golden AI
edited on 1 Dec, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7425224 High pressure chemical vapor trapping method
Edits on 25 Nov, 2021
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Golden AI
edited on 25 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7361387 Plasma enhanced pulsed layer deposition
Edits on 22 Nov, 2021
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Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7270729 System for, and method of, etching a surface on a wafer
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Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7235484 Nanolayer thick film processing system and method
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Golden AI
edited on 22 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7223699 Plasma etch reactor and method
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Golden AI
edited on 22 Nov, 2021
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Golden AI
edited on 22 Nov, 2021
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Golden AI
edited on 22 Nov, 2021
Edits on 21 Nov, 2021
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Golden AI
edited on 21 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7163721 Method to plasma deposit on organic polymer dielectric film
Edits on 19 Nov, 2021
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Golden AI
edited on 19 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
‌
US Patent 7153542 Assembly line processing method
Edits on 17 Nov, 2021
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Golden AI
edited on 17 Nov, 2021
Edits made to:
Infobox (+1 properties)
Infobox
Patents
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US Patent 7115169 Replaceable shielding apparatus

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