Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jun Hatakeyama0
Masaki Ohashi0
Date of Patent
October 16, 2018
0Patent Application Number
156920130
Date Filed
August 31, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition comprising a 2,5,8,9-teraaza-1-phosphabicyclo[3.3.3]undocane, biguanide or phosphazene salt of an iodinated aromatic group-containing carboxylic acid exhibits a sensitizing effect and an acid diffusion suppressing effect and forms a pattern having improved resolution, LWR and CDU.
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